Specifies minimum requirements for a monitoring plan for cleanroom or clean
zone performance related to air cleanliness by particle concentration, based upon parameters that
measure or affect airborne particle concentration...
Specifies the classification of air cleanliness in terms of concentration of airborne
particles in cleanrooms and clean zones; and separative devices as defined in ISO 14644-7...
Specifies requirements for the design and construction of cleanroom installations but does not prescribe specific technological or contractual means to meet these requirements..
Defines the classification system for cleanliness of surfaces in cleanrooms with
regard to the presence of chemical compounds or elements (including molecules, ions, atoms and
particles)...
Establishes the classification of cleanliness levels on solid surfaces by particle
concentration in cleanrooms and associated controlled environment applications...
Gives guidance on methods for the evaluation of microbiological data and the estimation of results obtained from sampling for viable particles in risk zones for biocontamination control...
Provides requirements and guidelines for assessing the chemical airborne cleanliness of equipment and materials which are foreseen to be used in cleanrooms and associated controlled environments which are linked to the ISO standard for cleanliness cl..