Provides requirements and guidelines for assessing the chemical airborne cleanliness of equipment and materials which are foreseen to be used in cleanrooms and associated controlled environments which are linked to the ISO standard for cleanliness cl
KS ISO 14644-15:2017
Cleanrooms and associated controlled environments-Part 15:Assessment of suitability for use of equipment and materials by airborne chemical concentration
Number of Pages:21
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Kes 3,437.00