Specifies a methodology to assess the suitability of equipment (e.g. machinery, measuring equipment, process equipment, components and tools) for use in cleanrooms and associated controlled environments, with respect to airborne particle cleanliness
KS ISO 14644-14:2016
Cleanrooms and associated controlled environment-Part 14:Assessment of suitability for use of equipment by airborne particle concentration.
Number of Pages:21.
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Kes 3,437.00