Specifies minimum requirements for a monitoring plan for cleanroom or clean zone performance related to air cleanliness by particle concentration, based upon parameters that measure or affect airborne particle concentration.

KS ISO 14644-2:2015

Cleanrooms and associated controlled environment-Part 2:Monitoring to provide evidence of cleanroom performance related to air cleanliness by particle concentration.

Number of Pages:14.

  • Kes 3,167.00